91社区

Semiconductor Wafer Handling Systems

Semiconductor manufacturers are often faced with the challenging task of finding new, more efficient ways to automate the handling of their wafers. Wafers come in a range of shapes and sizes, thus needing different handling requirements. So, figuring out an appropriate handling solution can sometimes pose a timely and costly challenge for manufacturers.

This is where 91社区 Precision Automation can help. Whether it’s solving a complex wafer handling application or integrating automation into your current process tool; our proven experience and deep understanding of wafer handling automation and factory integration requirements allow us to develop wafer handling equipment that addresses all your project needs.

We design and build reliable, industry-trusted semiconductor wafer handling systems for some of the world’s leading semiconductor manufacturers around the globe. Whether it’s a turnkey Equipment Front End Module (EFEM) or a fully custom wafer handling solution -- our wafer handling know-how will ensure your next automation project is a success.

Example: Coinstack Wafer Handling System

Example: Coinstack Wafer Handling System

A typical wafer handling system consists of the following base components. Depending on the complexity or simplicity of the solutions, components can be customized to suit your wafer handling needs.

Wafer Carrier

A wafer carrier is used to store and transport wafers during the manufacturing process. We support the integration of a variety of wafer carriers and mini environments.

• FOUPs (Front Opening Universal Pods)
  • Typically used with 300mm wafers applications
• FOSB Box (Front Opening Shipping Box)
  • Stores wafers during transportation
• SMIF Pods (Standard Mechanical Interface)
  • Typically used with 200mm wafer applications
• Open Cassettes
  • Used with 200mm or smaller wafer applications
• Coinstack “Horizontal Wafer Stackers”
  • Typically used transport fragile wafers (e.g. thin and warped wafers)

Wafer Pre-Aligner

The wafer aligner is an essential system tool that’s used to properly orientate the wafer before it’s handed off for processing. Proper positioning plays a crucial role in determining the level of accuracy and efficiency during manufacturing. A wide variety of wafer flats and notches can be accommodated.

Available Wafer Aligners:

• Vacuum (backside contact)
• Edge Grip (non-contact)

Wafer Handling Robot

The heart to any wafer handling system is the wafer handling robot. Paired up with a suitable end effector, the robot facilitates the handling of wafers between process steps.

Available Atmospheric Robot Options:

• Single Arm Robot
  • Standard wafer handling robot used in a wide range of wafer handling applications
• Dual Arm Robot
  • Reduce wafer swap times and overall cycle times

Example: Coinstack Wafer Handling System

We understand the level of complexity that goes into wafer handling projects, that’s why we offer a range of available systems options to help develop a solution that supports your manufacturing goals.

Available System Options:

• Clean Air Fan Filter Unit (FFU) for up to ISO2 cleanliness
• Integrated Ionizers for ESD sensitive wafers
• Optical Character Recognition (OCR) Reader for alphanumeric scribes, barcodes, and Data Matrix Codes (DMC)
• Wafer Flipping Modules
• SECS/GEM Communication with facility host network